Silicone Diffusion Pump Oil LC-275

Specification of Silicone Diffusion Pump Oil LC-275

Technical Index

Feature of Silicone Diffusion Pump Oil LC-275

• Extremely low saturated vapor pressure, excellent vacuum limit

• Strong thermal oxygen stability, high temperature resistance without cracking

• Narrow distillation range, high purity, clean, pollution-free, and anti backflow oil

• Stable viscosity temperature characteristics and wide adaptability to working conditions

• Excellent radiation resistance and chemical inertness

• Combining lubrication and sealing performance to extend equipment lifespan

  
  

Applications of Silicone Diffusion Pump Oil LC-275

• Cutting edge ultra-high vacuum equipment: As the core working fluid of the diffusion pump, it is used in the vacuum system of semiconductor extreme ultraviolet lithography (EUV) equipment, quantum device preparation, and ultra-high vacuum surface analysis instruments (such as XPS, STM) to achieve the ultimate vacuum environment.

• High end industrial processes: semiconductor 3D packaging, third-generation semiconductor (gallium nitride, silicon carbide) epitaxial growth, aerospace device vacuum testing (such as satellite component leak detection), and other scenarios that require a vacuum degree greater than 10 ⁻⁹ Pa.

• Research fields: Vacuum maintenance systems for nuclear fusion experimental devices (such as tokamak devices), cosmic ray detection equipment, high-precision vacuum measurement calibration devices.

• Special vacuum coating: Optical thin films (such as high reflectivity laser lens coating), superconducting material coating, and other coating processes that require impurity free vacuum environment.