Silicone Diffusion Pump Oil LC-274

Specification of Silicone Diffusion Pump Oil LC-274

Technical Index

Feature of Silicone Diffusion Pump Oil LC-274

• Extremely low saturated vapor pressure

• High and low temperature resistance

• Strong anti pollution ability

• Strong chemical inertness

• Ultra high vacuum adaptability

• Excellent thermal stability

• Good compatibility

Applications of Silicone Diffusion Pump Oil LC-274

• Core medium of ultra-high vacuum diffusion pump: As the working fluid of the diffusion pump, it is used in ultra-high vacuum systems for electron beam evaporation coating, semiconductor wafer processing, vacuum melting, and high-energy physics experimental devices (such as particle accelerators), achieving pumping from low vacuum to 10 ⁻¹⁰ Pa level ultra-high vacuum.

• Vacuum detection and calibration equipment: used for vacuum gauge (such as ionization vacuum gauge) calibration system, vacuum medium for leakage detection equipment, to ensure detection accuracy.

• High end industrial vacuum processes: semiconductor chip manufacturing (photolithography, etching processes), optical coating (high-precision lens/mirror coating), vacuum drying (high-end materials such as aerospace composite materials), and other scenarios that require strict vacuum requirements.

• Research fields: Laboratory ultra-high vacuum chambers (such as surface physics and vacuum coating research), vacuum maintenance systems for nuclear fusion experimental devices.